SYSTEM CONFIGURATION

• me-GUN TYPE :SE image Resolution 4nm@30KV Max Probe current : 45nA Acceleration Voltage : 1 to 30KV
• E-GUN TYPE : SE image Resolution 3nm@5KV Acceleration Voltage : 1 to 30KV Electron Source : Thermal Field Emission Type(ZrO/W)
• BEAM CURRENT : Max probe current 45nA
• DEPO SYSTEM : Pt, C
• VACUUM TYPE : Turbomolecular Pump ,mechanical Pump, Ion getter pump
• STAGE TYPE : 200mm specimen compatible stage 5 Axis motor operation : XY feed-back control
• LOADLOCK TYPE : Loadlock
• PS/OS : Xvision 5.1.8
• DERECTOR : SEM Column Integrated In-Lens SE/BSE Secondary Electron Detector Installed in teh Main Chamber

*The system is operating in Taiwan service Lab dealing with failure analysis and TEM sample prep jobs.