SYSTEM CONFIGURATION

• I-GUN TYPE : 5nm column
• BEAM CURRENT : 3pA~931pA (50KV)
• DEPO SYSTEM : Tungsten, Tmcts, O2, H2O, Cl2(or Br2), XeF2
• VACUUM TYPE : Turbomolecular Pump, Mechanical Pump*2, Ion getter pump*2
• STAGE TYPE : 200mm*200mm
• LOADLOCK TYPE : Loadlock system
• PS/OS : IBM RISC System / 6000 43P, model 140 computer / AIX 4.1.5
• DERECTOR : MCP