規格詳情

• I-gun type : Magnum column
• E-gun type : Sirion FEG column
• Beam current : 10pA~20nA
• GIS system : Pt
• Vacuum type : Turbomolecular Pump, mechanial Pump, Ion getter pump
• stage type : 50x50mm T SMCB
• PS/OS : MS windows NT 2,000,FEI XP 3.0

*The system is operating in Taiwan Service Lab supporting routine TEM jobs.