Vacuum system: EDWARDS XDS10 Scroll pump / Sample stage: 5-Axes motorized X-Y-Z-rotate-tilt stage 

Step size: 100 nm (Minimum) / High vacuum: 10^-10 mbar 

Travel: X, Y-Axis: 150 mmZ-Axis: 10 mmTilt range: -5° to +60°

Repeatability: 1 µm at 0°2 µ at 52° / Electron optics: Magnetic immersion lens ,Ultra-high brightness emitter  / Source: SCHOTTKY Field emitter

Accelerating voltage: 350 V to 30 kV (Continously adjustable) / Beam current: 1 pA - 22 nA

Resolution:0.9 nm at 15 kV / 1.4 nm at 1 kV

Ion optics: Sidewinder Field emission focused ion beam optics ,Liquid Gallium ion emitter / Accelerating voltage: 0.5 kV to 30 kV (Continuously adjustable)

Beam current: 1.5 pA - 20 nA

Imaging resolution: 5 nm at 30 kV / Milling resolution: 10 nn on Cr thin film 

Scanner: High-resolution digital scanning engine / Resolution: 512x442, 1024x884, 2048x1768, 4096x3536 pixels / Minimum dwell time: 25 ns/pixel / Electronic scan rotation by 360° 

Patterning system: Maximum resolution: 64k x 64k / Minimum dwell: 25 ns/pixel / Maximum dwell: 25 ms/pixel / Multiple pattern shapes / Complex milling pattern through bitmap import

Detectors: In-lens SE and BSE True Lens Detector (TLD) / Everhart-Thornely SE Detector (ETD) / 14-Segements solid state STEM II detector / Chamber viewing IR CCD camera

Controller: Microscope controller LCD Monitor, 19"Screen resolution: 1280x1024 Optical mouse

Chamber door mounted interface for manipulators Broad beam plasma source ion column (Focus 250 µm) Manuals included

Does not include manipulator.