The MKS Model 153D-2-50-2 control valve
is an intelligent exhaust throttle valve with an integrated controller.
Key features include：
| NO |
Specification |
| 1 |
Inner diameter: 2 inches (51 mm)
|
| 2 |
Flange size: NW50 ISO-KF
|
| 3 |
operating modes: can operate in swing positioning or pressure control mode
|
| 4 |
Material: 316 stainless steel & sealing material
|
| 5 |
Operating temperature: 0 - 70°C (ambient temperature), valve body up to 90°C
|
| 6 |
Drive mode: Mechanical drive
(with built-in cosine generator to linearize valve transmission characteristics)
|
This type of valve is often used in applications requiring precise pressure control,
such as semiconductor manufacturing and vacuum systems.
